JPH0249421A - 拡散炉用炉心管の構造 - Google Patents
拡散炉用炉心管の構造Info
- Publication number
- JPH0249421A JPH0249421A JP11185889A JP11185889A JPH0249421A JP H0249421 A JPH0249421 A JP H0249421A JP 11185889 A JP11185889 A JP 11185889A JP 11185889 A JP11185889 A JP 11185889A JP H0249421 A JPH0249421 A JP H0249421A
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- cover body
- furnace
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 title claims description 6
- 238000004140 cleaning Methods 0.000 claims abstract description 11
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 238000007789 sealing Methods 0.000 abstract description 3
- 230000002093 peripheral effect Effects 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000037237 body shape Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11185889A JPH0249421A (ja) | 1989-04-28 | 1989-04-28 | 拡散炉用炉心管の構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11185889A JPH0249421A (ja) | 1989-04-28 | 1989-04-28 | 拡散炉用炉心管の構造 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10458978A Division JPS5530869A (en) | 1978-08-28 | 1978-08-28 | Furnace core tube for use in diffusion furnace and method of washing same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0249421A true JPH0249421A (ja) | 1990-02-19 |
| JPH0542812B2 JPH0542812B2 (en]) | 1993-06-29 |
Family
ID=14571924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11185889A Granted JPH0249421A (ja) | 1989-04-28 | 1989-04-28 | 拡散炉用炉心管の構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249421A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100703169B1 (ko) * | 2004-08-26 | 2007-04-05 | 여환동 | 건축물의 단열, 방수구조 및 공법 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5185374A (en]) * | 1974-12-06 | 1976-07-26 | Norton Co | |
| JPS5222477A (en) * | 1975-08-13 | 1977-02-19 | Toshiba Ceramics Co Ltd | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
-
1989
- 1989-04-28 JP JP11185889A patent/JPH0249421A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5185374A (en]) * | 1974-12-06 | 1976-07-26 | Norton Co | |
| JPS5222477A (en) * | 1975-08-13 | 1977-02-19 | Toshiba Ceramics Co Ltd | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100703169B1 (ko) * | 2004-08-26 | 2007-04-05 | 여환동 | 건축물의 단열, 방수구조 및 공법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542812B2 (en]) | 1993-06-29 |
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